博士論文

LSI配線用ナノ炭素材料の合成プロセスに関する研究

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LSI配線用ナノ炭素材料の合成プロセスに関する研究

Persistent ID (NDL)
info:ndljp/pid/11644880
Material type
博士論文
Author
佐藤, 元伸
Publisher
-
Publication date
2020-03-25
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
Tohoku University,博士（工学）
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type:博士学位論文 (Thesis(doctor))課程

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Digital

Material Type
博士論文
Title
LSI配線用ナノ炭素材料の合成プロセスに関する研究
Author/Editor
佐藤, 元伸
Author Heading
佐藤, 元伸
Publication Date
2020-03-25
Publication Date (W3CDTF)
2020-03-25
Contributor
高桑雄二
Degree grantor/type
Tohoku University
Date Granted
2020-03-25
Date Granted (W3CDTF)
2020-03-25