液体原料シリコン系薄膜のレーザーアニールによる形成と結晶シリコン薄膜トランジスタへの応用
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国立国会図書館デジタルコレクション
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DOI[10.34413/dr.01445]to the data of the same series
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- Material Type
- 博士論文
- Title Transcription
- エキタイ ゲンリョウ シリコンケイ ハクマク ノ レーザー アニール ニ ヨル ケイセイ ト ケッショウ シリコン ハクマク トランジスタ エノ オウヨウ
- Author/Editor
- 菱谷, 大輔
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2017-03-24
- Publication Date (W3CDTF)
- 2017-03-24
- Alternative Title
- Formation of solution-derived Silicon Based Thin Film by Laser Annealing and Its Application to Crystalline Silicon Thin Film Transistors
- Degree grantor/type
- 奈良先端科学技術大学院大学