博士論文

実験室宇宙物理学及び軟X線リソグラフィー応用のためのレーザー生成プラズマの分光に関する実験的研究

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実験室宇宙物理学及び軟X線リソグラフィー応用のためのレーザー生成プラズマの分光に関する実験的研究

Persistent ID (NDL)
info:ndljp/pid/11710891
Material type
博士論文
Author
劉, 暢
Publisher
-
Publication date
2020-12-18
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
OU,博士(理学)
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Digital

Material Type
博士論文
Title Transcription
ジッケンシツウチュウブツリガクオヨビナンエックスセンリソグラフィーオウヨウノタメノレーザーセイセイプラズマノブンコウニカンスルジッケンテキケンキュウ
Author/Editor
劉, 暢
Author Heading
Publication Date
2020-12-18
Publication Date (W3CDTF)
2020-12-18
Alternative Title
Experimental study on spectroscopy of laser-produced plasma for laboratory astrophysics and soft X-ray lithography application
Degree grantor/type
OU
Date Granted
2020-12-18