実験室宇宙物理学及び軟X線リソグラフィー応用のためのレーザー生成プラズマの分光に関する実験的研究
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国立国会図書館デジタルコレクション
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DOI[10.18910/81884]to the data of the same series
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- Material Type
- 博士論文
- Title Transcription
- ジッケンシツウチュウブツリガクオヨビナンエックスセンリソグラフィーオウヨウノタメノレーザーセイセイプラズマノブンコウニカンスルジッケンテキケンキュウ
- Author/Editor
- 劉, 暢
- Author Heading
- Publication Date
- 2020-12-18
- Publication Date (W3CDTF)
- 2020-12-18
- Alternative Title
- Experimental study on spectroscopy of laser-produced plasma for laboratory astrophysics and soft X-ray lithography application
- Degree grantor/type
- 大阪大学
- Date Granted
- 2020-12-18