Monitoring of sulfur-containing additives in copper electrodeposition by rotating ring-disk electrode and copper electrodeposition for hybrid bonding

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Monitoring of sulfur-containing additives in copper electrodeposition by rotating ring-disk electrode and copper electrodeposition for hybrid bonding

Persistent ID (NDL): info:ndljp/pid/11712400

Material type: 博士論文

Author: Tran Van Nhat Anh

Publisher: Tran Van Nhat Anh

Publication date: 2021

Material Format: Digital

Capacity, size, etc.: -

Name of awarding university/degree: 京都大学,博士(エネルギー科学)

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Material Type: 博士論文
Title: Monitoring of sulfur-containing additives in copper electrodeposition by rotating ring-disk electrode and copper electrodeposition for hybrid bonding
Author/Editor: Tran Van Nhat Anh
Publication, Distribution, etc.: Tran Van Nhat Anh
Publication Date: 2021
Publication Date (W3CDTF): 2021
Alternative Title: イオウを含有する添加剤の回転リング-ディスク電極によるモニタリングとハイブリッド接合のための電気銅めっき
Degree grantor/type: 京都大学
Date Granted: 2021-05-24
Date Granted (W3CDTF): 2021-05-24
Dissertation Number: 甲第23396号
Degree Type: 博士(エネルギー科学)
Text Language Code: eng
Persistent ID (NDL): info:ndljp/pid/11712400
https://dl.ndl.go.jp/pid/11712400
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（送信）
Date Accepted (W3CDTF): 2021-08-10T20:12:01+09:00
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
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