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プラズマ援用研磨を用いた大面積単結晶ダイヤモンド基板の高能率・ダメージフリー仕上げプロセスの開発
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国立国会図書館デジタルコレクション
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DOI[10.18910/88082]to the data of the same series
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- Material Type
- 博士論文
- Title Transcription
- プラズマエンヨウケンマヲモチイタダイメンセキタンケッショウダイヤモンドキバンノコウノウリツ・ダメージフリーシアゲプロセスノカイハツ
- Author/Editor
- 劉, 念
- Author Heading
- Publication Date
- 2022-03-24
- Publication Date (W3CDTF)
- 2022-03-24
- Alternative Title
- Development of highly efficient and damage-free finishing process of large-sized single crystal diamond substrate using plasma-assisted polishing
- Degree grantor/type
- OU
- Date Granted
- 2022-03-24