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脆性機能材料に対するプラズマを用いたナノ精度形状創成・表面仕上げ技術の開発
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国立国会図書館デジタルコレクション
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DOI[10.18910/88027]to the data of the same series
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- Material Type
- 博士論文
- Title Transcription
- ゼイセイキノウザイリョウニタイスルプラズマヲモチイタナノセイドケ イジョウソウセイ・ヒョウメンシアゲギジュツノカイハツ
- Author/Editor
- ソン, エイケン
- Author Heading
- Publication Date
- 2022-03-24
- Publication Date (W3CDTF)
- 2022-03-24
- Alternative Title
- Development of plasma-based nano-precision figuring and finishing techniques for brittle functional materials
- Degree grantor/type
- OU
- Date Granted
- 2022-03-24