SiCウエハに対する高能率スラリーレス超音波援用電気化学機械研磨法の開発
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DOI[10.18910/87734]to the data of the same series
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Provided by：国立国会図書館デジタルコレクションLink to Help Page
2022-11-07 再収集
2022-11-07 再収集
2023-09-08 再収集
2023-09-08 再収集
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- Material Type
- 博士論文
- Title Transcription
- SiCウエハニタイスルコウノウリツスラリーレスチョウオンパエンヨウデンキカガクキカイケンマホウノカイハツ
- Author/Editor
- 楊, 暁喆
- Author Heading
- Publication Date
- 2022-01-31
- Publication Date (W3CDTF)
- 2022-01-31
- Alternative Title
- Development of highly-efficient slurryless ultrasonic vibration assisted electrochemical mechanical polishing for silicon carbide wafers
- Degree grantor/type
- 大阪大学
- Date Granted
- 2022-01-31