Precision Measurement of Micro and Nano-Structures by Using Atomic Force Microscope

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Precision Measurement of Micro and Nano-Structures by Using Atomic Force Microscope

Persistent ID (NDL): info:ndljp/pid/12361181

Material type: 博士論文

Author: Zhang, Kai

Publisher: -

Publication date: 2022-03-25

Material Format: Digital

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Name of awarding university/degree: Tohoku University,博士（工学）

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Note (General)：: type:博士学位論文 (Thesis(doctor))課程

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Material Type: 博士論文
Title: Precision Measurement of Micro and Nano-Structures by Using Atomic Force Microscope
Author/Editor: Zhang, Kai
Author Heading: Zhang, Kai
Publication Date: 2022-03-25
Publication Date (W3CDTF): 2022-03-25
Alternative Title: 原子間力顕微鏡によるマイクロ・ナノ構造体の精密計測に関する研究
Contributor: 高偉
Degree grantor/type: Tohoku University
Date Granted: 2022-03-25
Date Granted (W3CDTF): 2022-03-25
Dissertation Number: 甲第20361号
Degree Type: 博士（工学）
Conferring No. (Dissertation): 甲第20361号
Text Language Code: eng
Target Audience: 一般
Note (General): type:博士学位論文 (Thesis(doctor))
課程
Persistent ID (NDL): info:ndljp/pid/12361181
https://dl.ndl.go.jp/pid/12361181
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（自動収集）
Date Accepted (W3CDTF): 2022-11-07T16:56:35+09:00
Date Created (W3CDTF): 2022-10-24
2022-03-25
Format (IMT): PDF
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): http://hdl.handle.net/10097/00135862
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp