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イオンビームおよびプラズマエッチングにおける表面原子過程の分子動力学シミュレーション
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国立国会図書館デジタルコレクション
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DOI[10.18910/89620]to the data of the same series
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- Material Type
- 博士論文
- Title Transcription
- イオンビームオヨビプラズマエッチングニオケルヒョウメンゲンシカテイノブンシドウリキガクシミュレーション
- Author/Editor
- モーシャン, アイニ ニコラ
- Author Heading
- Publication Date
- 2022-09-22
- Publication Date (W3CDTF)
- 2022-09-22
- Alternative Title
- Molecular Dynamics simulations of surface atomic processes in ion-beam and plasma etching
- Degree grantor/type
- OU
- Date Granted
- 2022-09-22