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博士論文

Development of layer-by-layer characterization method for semiconductor devices using terahertz spectroscopy

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Development of layer-by-layer characterization method for semiconductor devices using terahertz spectroscopy

Persistent ID (NDL)
info:ndljp/pid/12513675
Material type
博士論文
Author
宮川, 敬太
Publisher
宮川, 敬太
Date granted
2021-03-24
Material Format
Digital
Capacity, size, etc.
-
Degree grantor and degree
大阪大学,博士(工学)
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Digital

Material Type
博士論文
Title
Development of layer-by-layer characterization method for semiconductor devices using terahertz spectroscopy
Author/Editor
宮川, 敬太
Publication, Distribution, etc.
宮川, 敬太
Publication Date
2021
Publication Date (W3CDTF)
2021
Alternative Title
テラヘルツ分光を用いた半導体デバイスの層ごとの特性評価法の開拓
Degree Grantor
大阪大学
Date Granted
2021-03-24
Date Granted (W3CDTF)
2021-03-24