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Crystalline silicon growth at low-temperature and its application to thin-film transistors and related devices
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国立国会図書館デジタルコレクション
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DOI[10.34413/dr.01783]to the data of the same series
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- Material Type
- 博士論文
- Author/Editor
- Tanabe, Hiroshi
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2021-03-31
- Publication Date (W3CDTF)
- 2021-03-31
- Alternative Title
- 結晶Siの低温成長とその薄膜トランジスタ、関連デバイスへの応用ケッショウ Si ノ テイオン セイチョウ ト ソノ ハクマクトランジスタ カンレン デバイス エノ オウヨウ
- Degree grantor/type
- 奈良先端科学技術大学院大学
- Date Granted
- 2021-03-31