Time-resolved spectroscopy of glass ablation during micro-via processing using 248 nm excimer laser for semiconductor interposer packaging

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DOI[10.2961/jlmn.2022.03.2001]to the data of the same series

Time-resolved spectroscopy of glass ablation during micro-via processing using 248 nm excimer laser for semiconductor interposer packaging

Persistent ID (NDL): info:ndljp/pid/12894824

Material type: 記事

Author: Yasufumi Kawasujiほか

Publisher: Japan Laser Processing Society

Publication date: 2022-12

Material Format: Digital

Journal name: Journal of laser micro/nanoengineering 17(3)

Publication Page: -

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Material Type: 記事
Title: Time-resolved spectroscopy of glass ablation during micro-via processing using 248 nm excimer laser for semiconductor interposer packaging
Author/Editor: Yasufumi Kawasuji
Yasuhiro Adachi
Kazuhiko Moro
Publication, Distribution, etc.: 日本 : Japan Laser Processing Society
Publication Date: 2022-12
Publication Date (W3CDTF): 2022-12
Periodical title: Journal of laser micro/nanoengineering
No. or year of volume/issue: 17(3)
Volume: 17(3)
ISSN (Periodical Title): 1880-0688
ISSN-L (Periodical Title): 1880-0688
Text Language Code: eng
DOI: 10.2961/jlmn.2022.03.2001
https://doi.org/10.2961/jlmn.2022.03.2001
Persistent ID (NDL): info:ndljp/pid/12894824
https://dl.ndl.go.jp/pid/12894824
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
https://dl.ndl.go.jp/collections/B00043
Acquisition Basis: オンライン資料収集制度
Date Accepted (W3CDTF): 2023-06-20T10:17:19+09:00
Date Captured (W3CDTF): 2023-03-20
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): https://www.jlps.gr.jp/jlmn/archive/17/17_03/
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/12894823
https://dl.ndl.go.jp/pid/12894823
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp