博士論文

The fabrication and properties of crystal-based MEMS magnetic sensors (結晶ベースのMEMS磁気センサーの製造と特性)

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DOI[10.50928/0002001546]to the data of the same series

The fabrication and properties of crystal-based MEMS magnetic sensors (結晶ベースのMEMS磁気センサーの製造と特性)

Persistent ID (NDL)
info:ndljp/pid/12911166
Material type
博士論文
Author
CHEN, YINLING
Publisher
信州大学
Publication date
2023-03-20
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
信州大学(Shinshu university),博士（工学）
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Note (General)：

この博士論文は、次の学術雑誌論文を一部に使用しています。 / Diamond and Related Materials 129 :109340(2022); doi:10.1016/j.diamond.2022.109340 © 2022 Elsevier B.V. All rights rese...

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Table of Contents

  • 2023-09-07 再収集

  • 2023-09-07 再収集

  • 2023-09-07 再収集

  • 2023-12-08 再収集

  • 2023-12-08 再収集

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Digital

Material Type
博士論文
Title
The fabrication and properties of crystal-based MEMS magnetic sensors (結晶ベースのMEMS磁気センサーの製造と特性)
Author/Editor
CHEN, YINLING
Author Heading
CHEN, YINLING
Publication, Distribution, etc.
信州大学
Publication Date
2023-03-20
Publication Date (W3CDTF)
2023-03-20
Degree grantor/type
信州大学(Shinshu university)
Date Granted
2023-03-20
Date Granted (W3CDTF)
2023-03-20