極端紫外線リソグラフィにおける確率的欠陥の発生機構に関する研究

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DOI[10.18910/91914]to the data of the same series

極端紫外線リソグラフィにおける確率的欠陥の発生機構に関する研究

Persistent ID (NDL): info:ndljp/pid/12969362

Material type: 博士論文

Author: 春本, 将彦

Publisher: -

Publication date: 2023-03-23

Material Format: Digital

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Name of awarding university/degree: 大阪大学,博士（工学）

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Material Type: 博士論文
Title: 極端紫外線リソグラフィにおける確率的欠陥の発生機構に関する研究
Title Transcription: キョクタンシガイセンリソグラフィニオケルカクリツテキケッカンノハッセイキコウニカンスルケンキュウ
Author/Editor: 春本, 将彦
Author Heading: 春本, 将彦
Publication Date: 2023-03-23
Publication Date (W3CDTF): 2023-03-23
Alternative Title: Study on the mechanism of stochastic defects generation in EUV lithography
Degree grantor/type: 大阪大学
Date Granted: 2023-03-23
Date Granted (W3CDTF): 2023-03-23
Dissertation Number: 14401甲第22641号
Degree Type: 博士（工学）
Text Language Code: eng
Target Audience: 一般
DOI: 10.18910/91914
https://doi.org/10.18910/91914
Persistent ID (NDL): info:ndljp/pid/12969362
https://dl.ndl.go.jp/pid/12969362
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（自動収集）
Date Accepted (W3CDTF): 2023-08-04T23:03:29+09:00
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): https://doi.org/10.18910/91914
https://hdl.handle.net/11094/91914
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp