博士論文
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縦型GaNトレンチMOSFETの作製プロセスの確立とスイッチング性能向上に向けた検討

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縦型GaNトレンチMOSFETの作製プロセスの確立とスイッチング性能向上に向けた検討

Persistent ID (NDL)
info:ndljp/pid/13033015
Material type
博士論文
Author
石田, 崇
Publisher
石田, 崇
Publication date
2023
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
名古屋大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
石田, 崇
Publication, Distribution, etc.
Publication Date
2023
Publication Date (W3CDTF)
2023
Alternative Title
Study on establishment of the fabrication process of a vertical GaN trench MOSFET and increase in its switching performance
Degree grantor/type
名古屋大学
Date Granted
2023-03-27
Date Granted (W3CDTF)
2023-03-27