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Frequency modulated MEMS magnetometer using quadruple mass resonator
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- Zhang, Linxin
- Publication, Distribution, etc.
- Publication Date
- 2022
- Publication Date (W3CDTF)
- 2022
- Alternative Title
- 四重質量振動子を用いた周波数変調MEMS磁場センサ
- Degree grantor/type
- 東北大学
- Date Granted
- 2022-09-26
- Date Granted (W3CDTF)
- 2022-09-26