博士論文

Moving magnet and moving coil types of three-axis electromagnetic MEMS actuators with large displacement per size

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Moving magnet and moving coil types of three-axis electromagnetic MEMS actuators with large displacement per size

Persistent ID (NDL)
info:ndljp/pid/13114734
Material type
博士論文
Author
Wang, Huayu
Publisher
Wang, Huayu
Publication date
2022
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
東北大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
Wang, Huayu
Publication, Distribution, etc.
Publication Date
2022
Publication Date (W3CDTF)
2022
Alternative Title
大きな対寸法変位を有するムービングマグネット及びムービングコイル型3軸電磁MEMSアクチュエータ
Degree grantor/type
東北大学
Date Granted
2022-09-26
Date Granted (W3CDTF)
2022-09-26