博士論文

Study on hydrogen-related donor centers in silicon towards precise control of doping profiles for power devices

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Study on hydrogen-related donor centers in silicon towards precise control of doping profiles for power devices

Persistent ID (NDL)
info:ndljp/pid/13116211
Material type
博士論文
Author
清井, 明
Publisher
清井, 明
Publication date
2022
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
大阪大学,博士(工学)
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Digital

Material Type
博士論文
Title
Study on hydrogen-related donor centers in silicon towards precise control of doping profiles for power devices
Author/Editor
清井, 明
Publication, Distribution, etc.
清井, 明
Publication Date
2022
Publication Date (W3CDTF)
2022
Alternative Title
パワーデバイスのためのドーピングプロファイル精密制御に向けたシリコン中水素関連ドナーに関する研究
Degree grantor/type
大阪大学
Date Granted
2022-09-22
Date Granted (W3CDTF)
2022-09-22