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A study on physical property changes in dielectric and semiconductor materials induced by ion irradiation during plasma processing
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Bibliographic Record
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- Material Type
- 博士論文
- Author/Editor
- 濱野, 誉
- Publication, Distribution, etc.
- Publication Date
- 2023
- Publication Date (W3CDTF)
- 2023
- Alternative Title
- プラズマプロセス中のイオン照射により誘起される絶縁体および半導体材料の物性変化に関する研究
- Degree grantor/type
- 京都大学
- Date Granted
- 2023-03-23
- Date Granted (W3CDTF)
- 2023-03-23