博士論文

超純水を用いた結晶表面処理プロセスとその微細構造解析に関する研究

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超純水を用いた結晶表面処理プロセスとその微細構造解析に関する研究

Persistent ID (NDL)
info:ndljp/pid/13723195
Material type
博士論文
Author
徳田, 祥典
Publisher
-
Publication date
2024-03-25
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
名古屋大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
徳田, 祥典
Author Heading
Publication Date
2024-03-25
Publication Date (W3CDTF)
2024-03-25
Alternative Title
Crystal surface treatment using ultrapure water and its microstructure analysis
Degree grantor/type
名古屋大学
Date Granted
2024-03-25
Date Granted (W3CDTF)
2024-03-25