量産型HVPE成膜装置向けGaCl₃供給技術の開発
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- Material Type
- 記事
- Author/Editor
- 内藤一樹清水裕大渡邉幸喜
- Publication, Distribution, etc.
- Publication Date
- 2022-03
- Publication Date (W3CDTF)
- 2022-03
- Alternative Title
- Development of GaCl₃ supply technology for mass-production halide vapor-phase epitaxy system
- Periodical title
- 大陽日酸技報
- No. or year of volume/issue
- (40)
- Volume
- (40)