SR4000HTによるAlGaN系遠紫外LED成長の実証とAlGaNのAl組成及び膜厚制御による均一性改善技術の開発
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- Material Type
- 記事
- Author/Editor
- 吉永純也池尻圭太郎徳永裕樹
- Publication, Distribution, etc.
- Publication Date
- 2023-03
- Publication Date (W3CDTF)
- 2023-03
- Alternative Title
- Demonstration of AlGaN-based Far-UVC LED epitaxial growth by using SR4000HT and development of technology to improve uniformity by controlling Al composition and thickness of AlGaN
- Periodical title
- 大陽日酸技報
- No. or year of volume/issue
- (41)
- Volume
- (41)