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博士論文

Growth and control of transition metal dichalcogenide thin-films by reactive sputtering

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Growth and control of transition metal dichalcogenide thin-films by reactive sputtering

Persistent ID (NDL)
info:ndljp/pid/14306635
Material type
博士論文
Author
金, 明玉
Publisher
金, 明玉
Date granted
2023-09-22
Material Format
Digital
Capacity, size, etc.
-
Degree grantor and degree
東京大学,博士(工学)
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Digital

Material Type
博士論文
Title
Growth and control of transition metal dichalcogenide thin-films by reactive sputtering
Author/Editor
金, 明玉
Publication, Distribution, etc.
金, 明玉
Publication Date
2023
Publication Date (W3CDTF)
2023
Alternative Title
反応性スパッタによる遷移金属カルコゲナイド薄膜の成長と制御
Degree Grantor
東京大学
Date Granted
2023-09-22
Date Granted (W3CDTF)
2023-09-22