新規粒子堆積成膜法 : 超音速フリージェットPVD の開発 : 高い成膜速度による緻密コーティングの形成
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- Material Type
- 記事
- Author/Editor
- 湯本敦史
- Publication, Distribution, etc.
- Publication Date
- 2024-11-01
- Publication Date (W3CDTF)
- 2024-11-01
- Alternative Title
- Novel particle deposition technology : development of supersonic free-jet PVD : synthesis of dense coating films with high-deposition rate
- Periodical title
- 耐火物
- No. or year of volume/issue
- 76(11)(802)
- Volume
- 76(11)(802)