イオン照射に伴う格子欠陥生成とスパッタリングに 起因する半導体材料の表面構造形成
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DOI[10.32149/0002000267]to the data of the same series
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- Material Type
- 博士論文
- Author/Editor
- 大石, 脩人
- Publication, Distribution, etc.
- Publication Date
- 2025-03-18
- Publication Date (W3CDTF)
- 2025
- Alternative Title
- Surface Structure Formation Resulting from Lattice Defect Generation and Sputtering via Ion Irradiation in Semiconductor Materials
- Degree Grantor
- 高知工科大学
- Date Granted
- 2025-03-18
- Date Granted (W3CDTF)
- 2025-03-18