高誘電体材料ドライエッチングガス
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- Material Type
- 記事
- Title
- Author/Editor
- 北川智洋斧高一大沢正典
- Publication, Distribution, etc.
- Publication Date
- 2005-12-02
- Publication Date (W3CDTF)
- 2005-12-02
- Extent
- 容量 : 03.pdf(1258841bytes)
- Alternative Title
- Reactive gases for dry etching of high-dielectric-constant film materials
- Periodical title
- 大陽日酸技報
- No. or year of volume/issue
- (24)