高性能窒化膜プロセス向けキセノン循環型供給装置の開発
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- Material Type
- 記事
- Author/Editor
- 佐藤貴之山脇正也長谷川英晴
- Publication, Distribution, etc.
- Publication Date
- 2005-12-02
- Publication Date (W3CDTF)
- 2005-12-02
- Extent
- 容量 : 05.pdf(653956bytes)
- Alternative Title
- Development of xenon recycling and supply system for high quality nitride film processing
- Periodical title
- 大陽日酸技報
- No. or year of volume/issue
- (24)