半導体上金属層の表面エレクトロマイグレーション
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 安永均
- Publication, Distribution, etc.
- Publication Date
- 1988
- Publication Date (W3CDTF)
- 1988
- Alternative Title
- Surface electromigration of metal-covered semiconductor
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 9(3)
- Volume
- 9(3)