水素終端シリコン表面の初期酸化過程と局所構造
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- Material Type
- 記事
- Author/Editor
- 池田浩也財満鎭明安田幸夫
- Publication, Distribution, etc.
- Publication Date
- 1996
- Publication Date (W3CDTF)
- 1996
- Alternative Title
- Initial oxidation processes and local bonding structures on H-terminated Si(100) surfaces
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 17(3)
- Volume
- 17(3)