高能率・超平滑化加工法 : 軟質粒子によるメカノケミカルポリシング
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- Material Type
- 記事
- Author/Editor
- 安永暢男
- Publication, Distribution, etc.
- Publication Date
- 2001-03
- Publication Date (W3CDTF)
- 2001-03
- Alternative Title
- High performance polishing method : mechanochemical polishing by soft abrasives
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 22(3)
- Volume
- 22(3)