分子動力学法によるシリコン酸化膜の大規模モデリング
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- Material Type
- 記事
- Author/Editor
- 渡邉孝信辰村光介大泊巖
- Publication, Distribution, etc.
- Publication Date
- 2002-02
- Publication Date (W3CDTF)
- 2002-02
- Alternative Title
- Large-scale modeling of silicon-dioxide films by means of molecular dynamics
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 23(2)
- Volume
- 23(2)