化学/バイオマイクロ・ナノシステム : エレクトロニクスの微細加工技術の化学/バイオへの応用
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 庄子習一
- Publication, Distribution, etc.
- Publication Date
- 2003-11
- Publication Date (W3CDTF)
- 2003-11
- Alternative Title
- Micro/nanosystems for chemical/biochemical applications : applications of MEMS and top-down nanotechnologies for chemistry and biotechnology
- Periodical title
- 表面科学 : 日本表面科学会誌
- No. or year of volume/issue
- 24(11)
- Volume
- 24(11)