STP technology for sealing three-dimensional MEMS structures

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STP technology for sealing three-dimensional MEMS structures

Persistent ID (NDL): info:ndljp/pid/8361692

Material type: 記事

Author: Norio Satoほか

Publisher: Nippon Telegraph and Telephone Corporation

Publication date: 2007-10

Material Format: Digital

Journal name: NTT technical review 5(10)

Publication Page: -

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Material Type: 記事
Title: STP technology for sealing three-dimensional MEMS structures
Author/Editor: Norio Sato
Kazuyoshi Ono
Hiroki Morimura
Publication, Distribution, etc.: 日本 : Nippon Telegraph and Telephone Corporation
Publication Date: 2007-10
Publication Date (W3CDTF): 2007-10
Periodical title: NTT technical review
No. or year of volume/issue: 5(10)
Volume: 5(10)
Text Language Code: eng
Persistent ID (NDL): info:ndljp/pid/8361692
https://dl.ndl.go.jp/pid/8361692
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > その他
https://dl.ndl.go.jp/collections/B00035
Acquisition Basis: オンライン資料収集制度
Date Accepted (W3CDTF): 2013-11-21T01:15:02+09:00
Date Captured (W3CDTF): 2013-08-23
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): https://www.ntt-review.jp/archive/ntttechnical.php?contents=ntr200710sp3.html
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/8361688
https://dl.ndl.go.jp/pid/8361688
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp