Modification and machining on back surface of a silicon substrate by femtosecond laser pulses at 1552 nm

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DOI[10.2961/jlmn.2014.02.0004]to the data of the same series

Modification and machining on back surface of a silicon substrate by femtosecond laser pulses at 1552 nm

Persistent ID (NDL): info:ndljp/pid/8749857

Material type: 記事

Author: Yoshiro Itoほか

Publisher: Japan Laser Processing Society

Publication date: 2014-06

Material Format: Digital

Journal name: Journal of laser micro/nanoengineering 9(2)

Publication Page: -

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Summary, etc.：: Silicon (Si) is widely used material in microelectronics, MEMS, photonics and more. Although Si is not transparent for commonly used processing lasers...

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Material Type: 記事
Title: Modification and machining on back surface of a silicon substrate by femtosecond laser pulses at 1552 nm
Author/Editor: Yoshiro Ito
Hiroki Sakashita
Ryosuke Suzuki
Publication, Distribution, etc.: 日本 : Japan Laser Processing Society
Publication Date: 2014-06
Publication Date (W3CDTF): 2014-06
Periodical title: Journal of laser micro/nanoengineering
No. or year of volume/issue: 9(2)
Volume: 9(2)
ISSN (Periodical Title): 1880-0688
ISSN-L (Periodical Title): 1880-0688
Text Language Code: eng
DOI: 10.2961/jlmn.2014.02.0004
https://doi.org/10.2961/jlmn.2014.02.0004
Persistent ID (NDL): info:ndljp/pid/8749857
https://dl.ndl.go.jp/pid/8749857
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > 電子書籍・電子雑誌 > 学術機関 > 学協会
https://dl.ndl.go.jp/collections/B00043
Acquisition Basis: オンライン資料収集制度
Date Accepted (W3CDTF): 2014-09-13T03:29:32+09:00
Date Captured (W3CDTF): 2014-07-20
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): https://www.jlps.gr.jp/jlmn/index.php?action=laser_volno&volno=902
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/8749853
https://dl.ndl.go.jp/pid/8749853
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp