RF-MBE法ホモエピタキシャル成長におけるGaN基板の成長前表面処理
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- Material Type
- 記事
- Author/Editor
- 久保秀一岡崎智一真鍋茂樹
- Publication, Distribution, etc.
- Publication Date
- 2000-03
- Publication Date (W3CDTF)
- 2000-03
- Alternative Title
- Pre-treatment of GaN substrate in homoepitaxial growth by RF-MBE
- Periodical title
- 山口大学工学部研究報告
- No. or year of volume/issue
- 50(2)
- Volume
- 50(2)