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博士論文

2つのBSE検出器を用いたロバストSEM照度差ステレオに関する研究

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2つのBSE検出器を用いたロバストSEM照度差ステレオに関する研究

Persistent ID (NDL)
info:ndljp/pid/8949792
Material type
博士論文
Author
陳, 德山
Publisher
Hokkaido University
Date granted
2014-03-25
Material Format
Digital
Capacity, size, etc.
-
Degree grantor and degree
北海道大学,Hokkaido University,博士(情報科学)
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Notes on use

Note (General):

(主査) 教授 金子 俊一, 教授 小野里 雅彦, 准教授 田中 孝之情報科学研究科(システム情報科学専攻)

Detailed bibliographic record

Summary, etc.:

This thesis presents a novel robust SEM photometric stereo method using two backscattered electron detectors. Robustness is one of the most important ...

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Bibliographic Record

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Digital

Material Type
博士論文
Author/Editor
陳, 德山
Author Heading
Publication, Distribution, etc.
Publication Date
2014-03-25
Publication Date (W3CDTF)
2014-03-25
Alternative Title
A Study on Robust SEM Photometric Stereo Using Two BSE Detectors
Contributor
金子, 俊一
小野里, 雅彦
田中, 孝之
Degree Grantor
北海道大学
Hokkaido University