博士論文

原子間力顕微鏡による高アスペクト構造計測に向けた探針形状推定手法および観察像補正に関する研究

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原子間力顕微鏡による高アスペクト構造計測に向けた探針形状推定手法および観察像補正に関する研究

Persistent ID (NDL)
info:ndljp/pid/8950815
Material type
博士論文
Author
原田, 恭彦
Publisher
群馬大学工学研究科
Publication date
2014-03-25
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
群馬大学,博士(工学)
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Notes on use

Note (General):

type:Thesis or Dissertation学位記番号:工博甲483

Table of Contents

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Digital

Material Type
博士論文
Author/Editor
原田, 恭彦
Author Heading
Publication, Distribution, etc.
Publication Date
2014-03-25
Publication Date (W3CDTF)
2014-03-25
Alternative Title
Estimation of 3-dimensional structure of atomic force microscope (AFM) probe and correction of the AFM image for precise measurement of nano-structure with high aspect ratio using AFM
Degree grantor/type
群馬大学
Date Granted
2014-03-25