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透明酸化物導電膜のスパッタ成膜プロセスのin-situ解析
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国立国会図書館デジタルコレクション
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DOI[10.34321/17130]to the data of the same series
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2024-06-07 再収集
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- Material Type
- 博士論文
- Title Transcription
- トウメイ サンカブツ ドウデンマク ノ スパッタ セイマク プロセス ノ in - situ カイセキ
- Author/Editor
- 塚本, 直樹
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2014
- Publication Date (W3CDTF)
- 2014
- Alternative Title
- In-situ analysis on sputter deposition process for transparent conducting oxides
- Degree grantor/type
- 青山学院大学