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放射線化学反応の初期過程に関する研究 -革新的パルスラジオリシスシステムの開発と高感度ポジ型レジストの反応機構の解明-
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- Material Type
- 博士論文
- Author/Editor
- Hosaka, Yuji保坂, 勇志
- Author Heading
- Publication Date
- 2013
- Publication Date (W3CDTF)
- 2013
- Alternative Title
- Research on Early Events in Radiation Chemistry: Development of Novel Pulse Radiolysis System and Research on Reaction Mechanism of Highly Sensitive Positive Type Resist
- Degree grantor/type
- 早稲田大学
- Date Granted
- 2014-03-15
- Date Granted (W3CDTF)
- 2014-03-15