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博士論文

Relationship between electrical characteristics and crystallographic properties in pseudo-single-crystal silicon thin-film transistors fabricated by phase-modulated excimer laser annealing

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Relationship between electrical characteristics and crystallographic properties in pseudo-single-crystal silicon thin-film transistors fabricated by phase-modulated excimer laser annealing

Persistent ID (NDL)
info:ndljp/pid/9446366
Material type
博士論文
Author
三谷, 昌弘
Publisher
三谷, 昌弘
Publication date
2014
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
奈良先端科学技術大学院大学,博士(工学)
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Digital

Material Type
博士論文
Author/Editor
三谷, 昌弘
Publication, Distribution, etc.
Publication Date
2014
Publication Date (W3CDTF)
2014
Alternative Title
位相変調エキシマレーザーアニーリングで作製した擬似単結晶シリコン薄膜トランジスタの電気的特性と結晶学的特性の関係の研究
Degree grantor/type
奈良先端科学技術大学院大学
Date Granted
2014-03-24
Date Granted (W3CDTF)
2014-03-24