Jump to main content

図書

Laser probes and numerical modeling as process diagnostics in chemical vapor deposition (SAND ; SAND-88-1313C; CONF-880408-26; DE88011622)

Icons representing 図書

Laser probes and numerical modeling as process diagnostics in chemical vapor deposition

(SAND ; SAND-88-1313C; CONF-880408-26; DE88011622)

Material type
図書
Author
Breiland, W.G., Ho, P., Coltrin, M.E. [et al.]
Publisher
Sandia National Labs.
Publication date
1988.1.
Material Format
Paper
Capacity, size, etc.
12p
NDC
-
View All

Search by Bookstore

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
図書
Title
Laser probes and numerical modeling as process diagnostics in chemical vapor deposition
Author/Editor
Breiland, W.G., Ho, P., Coltrin, M.E. [et al.]
Series Title
SAND ; SAND-88-1313C; CONF-880408-26; DE88011622
Author Heading
Breiland, W.G.
Ho, P.
Coltrin, M.E.
Kee, R.J.
Evans, G.H.
Publication, Distribution, etc.
Albuquerque, NM (USA), Livermore, CA (USA) : Sandia National Labs.
Publication Date
1988.1.
Publication Date (W3CDTF)
1988
Extent
12p
Place of Publication (Country Code)
us