超LSI多層配線AI CVD装置の開発

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Material Type: 図書
Title: 超LSI多層配線AI CVD装置の開発
Title Transcription: チョウLSI タソウハイセン AI CVD ソウチノカイハツ
Author/Editor: 坪内和夫研究代表者
Author Heading: 坪内, 和夫ツボウチ, カズオ
Publication, Distribution, etc.: [坪内和夫]
Publication Date: 1999.3
Publication Date (W3CDTF): 1999
Size: 30cm
Alternative Title: 平成10年度科学研究費補助金(基盤研究(A)(2))研究成果報告書(研究課題番号08555073)
Place of Publication (Country Code): ja
Target Audience: 一般
Related Material: 科学研究費補助金(基盤研究(A)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000794685227008
Related Material (URI): https://ci.nii.ac.jp/ncid/BB02937546#entity
Periodical Title: 科学研究費補助金(基盤研究(A)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000794685227008
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB02937546 : BB02937546