From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications : hardback 3rd ed

From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications : hardback

3rd ed

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Note (General)：: Includes bibliographical references and index"This third edition of Fundamentals of microfabrication"--P. [v]

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Material Type: 図書
ISBN: 9781420055160
Title: From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications
Volume: : hardback
Author/Editor: Marc J. Madou
Edition: 3rd ed
Author Heading: Madou, Marc J.
https://ci.nii.ac.jp/author/DA0355770X
Publication, Distribution, etc.: CRC Press
Publication Date: c2012
Publication Date (W3CDTF): 2012
Size: 29 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: BioMEMS
Nanoelectromechanical systems
Nanotechnology
Biotechnology
LCC: TP248.25.B54
Target Audience: 一般
Note (General): Includes bibliographical references and index
"This third edition of Fundamentals of microfabrication"--P. [v]
Related Material: Fundamentals of microfabrication and nanotechnology
https://cir.nii.ac.jp/crid/1130000795464954240
Related Material (URI): https://ci.nii.ac.jp/ncid/BB06583387#entity
https://lccn.loc.gov/2011014404
Periodical Title: Fundamentals of microfabrication and nanotechnology
https://cir.nii.ac.jp/crid/1130000795464954240
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB06583387 : BB06583387
LC Control Number: 2011014404
https://lccn.loc.gov/2011014404