Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah SPIE

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah SPIE

Material type: 図書

Author: editors, Bernd O. Kolbesen ... [et al.] ; sponsored by the Electrochemical Society. Electronics Division

Publisher: Electrochemical Society

Publication date: c2003

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: "SPIE Volume 5133" --on T.p. versoIncludes bibliographical references and indexes

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Paper

Material Type: 図書
ISBN: 1566773482
0819449997
Title: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
Volume: SPIE
Author/Editor: editors, Bernd O. Kolbesen ... [et al.] ; sponsored by the Electrochemical Society. Electronics Division
Author Heading: ALTECH
Electrochemical Society. Meeting
https://ci.nii.ac.jp/author/DA03398898
Kolbesen, Bernd O.
https://ci.nii.ac.jp/author/DA07746930
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c2003
Publication Date (W3CDTF): 2003
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): "SPIE Volume 5133" --on T.p. verso
Includes bibliographical references and indexes
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA62545478#entity
https://lccn.loc.gov/2003100709
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA62545478 : BA62545478
LC Control Number: 2003100709
https://lccn.loc.gov/2003100709