Proceedings of the 35th International Symposium on Electron, Ion, and Photon Beams, 28-31 May 1991 Seattle Sheraton Hotel & Towers, Seattle, Washington special casebound ed.

Proceedings of the 35th International Symposium on Electron, Ion, and Photon Beams, 28-31 May 1991 Seattle Sheraton Hotel & Towers, Seattle, Washington

special casebound ed.

Material type: 図書

Author: special editor for the proceedings, Jane Shaw

Publisher: Published for the American Vacuum Society by the American Institute of Physics

Publication date: 1991

Material Format: Paper

Capacity, size, etc.: -

NDC: -

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Notes on use

Note (General)：: "The proceedings are published in both the 1991 November/December issue of the Journal of vacuum science and technology B, vol. 9 no. 6 and in a speci...

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Paper

Material Type: 図書
ISBN: 1563960125
Title: Proceedings of the 35th International Symposium on Electron, Ion, and Photon Beams, 28-31 May 1991 Seattle Sheraton Hotel & Towers, Seattle, Washington
Author/Editor: special editor for the proceedings, Jane Shaw
Edition: special casebound ed.
Author Heading: International Symposium on Electron, Ion, and Photon Beams
https://ci.nii.ac.jp/author/DA03926114
Shaw, Jane
American Vacuum Society
https://ci.nii.ac.jp/author/DA03926125
Publication, Distribution, etc.: Published for the American Vacuum Society by the American Institute of Physics
Publication Date: 1991
Publication Date (W3CDTF): 1991
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Photolithography -- Congresses
Lithography, Electron beam -- Congresses
Ion beam lithography -- Congresses
X-ray lithography -- Congresses
Photoresists -- Congresses
LCC: TR940
Target Audience: 一般
Note (General): "The proceedings are published in both the 1991 November/December issue of the Journal of vacuum science and technology B, vol. 9 no. 6 and in a special casebound edition available to participants" -- T.p. verso
Related Material (URI): https://ci.nii.ac.jp/ncid/BA20543228#entity
https://lccn.loc.gov/91076907
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA20543228 : BA20543228
LC Control Number: 91076907
https://lccn.loc.gov/91076907