1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA :soft :micro

1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA :soft

Material type: 図書

Author: Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics

Publisher: Northern California Chapter of the American Vacuum Society

Publication date: c1996

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: "IEEE catalog no. 96TH8142"--T.p. versoIncludes bibliographical references and index

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Paper

Material Type: 図書
ISBN: 0965157709
0780330617
Title: 1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA
Volume: :soft
:micro
Author/Editor: Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics
Author Heading: International Symposium on Plasma Process-Induced Damage
Cheung, Kin P.
Nakamura, Moritaka
Gabriel, Calvin T.
https://ci.nii.ac.jp/author/DA10596199
IEEE Electron Devices Society
https://ci.nii.ac.jp/author/DA01257512
American Vacuum Society
https://ci.nii.ac.jp/author/DA03926125
応用物理学会オウヨウブツリガッカイ
https://ci.nii.ac.jp/author/DA00633233
Publication, Distribution, etc.: Northern California Chapter of the American Vacuum Society
Publication Date: c1996
Publication Date (W3CDTF): 1996
Size: 28 cm
Alternative Title: 96TH8142
Place of Publication (Country Code): us
Subject Heading: Semiconductor wafers -- Congresses
Semiconductors -- Effect of radiation on -- Congresses
Plasma radiation -- Congresses
LCC: TK7871.85
Target Audience: 一般
Note (General): "IEEE catalog no. 96TH8142"--T.p. verso
Includes bibliographical references and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA30279308#entity
https://lccn.loc.gov/96068444
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA30279308 : BA30279308
LC Control Number: 96068444
https://lccn.loc.gov/96068444