サブナノメートルの変位,形状測定機の自律絶対校正システムの試作

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Material Type: 図書
Title: サブナノメートルの変位,形状測定機の自律絶対校正システムの試作
Title Transcription: サブナノメートルノヘンイ,ケイジョウソクテイキノジリツゼッタイコウセイシステムノシサク
Author/Editor: 清野慧研究代表者
Author Heading: 清野, 慧キヨノ, サトシ
Publication, Distribution, etc.: [清野慧]
Publication Date: 1998.3
Publication Date (W3CDTF): 1998
Size: 30cm
Alternative Title: 平成8-9年度科学研究費補助金(基盤研究(A)(2))研究成果報告書(研究課題番号08505002)
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Related Material: 科学研究費補助金(基盤研究(A)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000794685227008
Related Material (URI): https://ci.nii.ac.jp/ncid/BB02879257#entity
Periodical Title: 科学研究費補助金(基盤研究(A)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000794685227008
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB02879257 : BB02879257