図書

ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

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ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

Material type
図書
Author
edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division
Publisher
Electrochemical Society
Publication date
c1995
Material Format
Paper
Capacity, size, etc.
23 cm
NDC
-
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Notes on use

Note (General):

ALTECH 95 was held Sept. 28-29, 1995 in The Hague, Netherlands in conjunction with ESSDERC 95, the 25th European Solid State Device Research Conferenc...

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Paper

Material Type
図書
ISBN
1566771226
Author/Editor
edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division
Publication, Distribution, etc.
Publication Date
c1995
Publication Date (W3CDTF)
1995
Size
23 cm
Alternative Title
Analytical techniques for semiconductor materials and process characterization II