図書

Studies on development of measurement technique of absolute densities of atomic species in reactive plasma process using vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

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Studies on development of measurement technique of absolute densities of atomic species in reactive plasma process using vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp

Material type
図書
Author
Seigou Takashima
Publisher
[s.n.]
Publication date
[2001]
Material Format
Paper
Capacity, size, etc.
30 cm
NDC
-
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Notes on use

Note (General)：

Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2001Kind of academic degree: 博士(工学)Date degree granted: 2001-03-26...

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Paper

Material Type
図書
Title
Studies on development of measurement technique of absolute densities of atomic species in reactive plasma process using vacuum ultraviolet absorption spectroscopy with microdischarge hollow cathode lamp
Author/Editor
Seigou Takashima
Author Heading
高島, 成剛 タカシマ, セイゴウ
Publication, Distribution, etc.
[s.n.]
Publication Date
[2001]
Publication Date (W3CDTF)
2001
Size
30 cm
Alternative Title
マイクロ放電ホローカソードランプを用いた真空紫外吸収分光法による反応性プラズマプロセス中の原子種の絶対密度計測技術の開発に関する研究
Text Language Code
en