走査型トンネル顕微鏡を用いた極薄シリコン酸化膜の形成及び劣化に関する研究

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Material Type: 図書
Title: 走査型トンネル顕微鏡を用いた極薄シリコン酸化膜の形成及び劣化に関する研究
Title Transcription: ソウサガタトンネルケンビキョウオモチイタゴクウスシリコンサンカマクノケイセイオヨビレッカニカンスルケンキュウ
Author/Editor: 大毛利健治 [著]
Author Heading: 大毛利, 健治オオモリ, ケンジ
Publication, Distribution, etc.: [出版者不明]
Publication Date: [2000]
Publication Date (W3CDTF): 2000
Size: 30cm
Alternative Title: Study on formation and degradation of ultra-thin SiO[2] films using scanning tunneling microscopy
Text Language Code: ja
Target Audience: 一般
Note (General): [2]は下つき文字
名古屋大学大学院工学研究科1999年度博士論文
学位の種類: 博士 (工学)
学位授与年月日: 2000-03-27
報告番号: 甲第4710号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB13928285#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB13928285 : BB13928285